High‐efficiency single etch step apodized surface grating ...
This is one of the lowest losses yet reported for single etch step grating couplers. The measured results are comparable to those achieved for apodized shallow etched grating couplers that, however, require thicker non-standard silicon waveguides 7 , 8 , 23 , small feature size (50 nm) 7 , 10 , or additional etch steps and increased fabrication ...
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